ASML and imec Sign Strategic Partnership

ASML Holding N.V. and imec announced that they have signed a new strategic partnership agreement, focusing on research and sustainability.

The agreement has a duration of five years and aims to deliver valuable solutions in two areas by bringing together ASML’s and imec’s respective knowledge and expertise. First, to develop solutions that advance the semiconductor industry, and second, to develop initiatives focused on sustainable innovation.

The collaboration incorporates ASML’s whole product portfolio, with a focus on developing high-end nodes, using ASML systems including 0.55 NA EUV, 0.33 NA EUV, DUV immersion, YieldStar optical metrology and HMI single- and multi-beam technologies.

These tools will be installed in imec’s state-of-the-art pilot line and incorporated in the EU- and Flemish-funded NanoIC pilot line, providing the most advanced infrastructure for sub-2nm R&D to the international semiconductor ecosystem. Focus areas for R&D will also include silicon photonics, memory and advanced packaging, offering full stack innovation for future semiconductor-based AI applications in diverse markets.

A new area in the collaboration consists of a significant contribution to fund innovative ideas and activities in imec’s research funnel that bring environmental and societal benefits.

“This agreement marks the next step in the longstanding cooperation between ASML and imec,” said Christophe Fouquet, ASML’s president and CEO. “It signals our joint ambitions to develop solutions for the semiconductor industry and fits our strategy of investing in technology and innovation that will benefit society at large.”

“We are excited to continue our longstanding unique partnership with ASML, offering the industry access to the most advanced patterning solutions for over 30 years,” added Luc Van den hove, president and CEO at imec. “The inclusion of ASML’s full product portfolio will allow us to expand and further mature the capabilities of our pilot line, providing the entire semiconductor ecosystem with the most advanced R&D to tackle the challenges of AI-driven technological advancements.”